ULTRATECH INC

CUSIP: 90403410 Class: COM

ARROWSTREET CAPITAL, LIMITED PARTNERSHIP's Holding History (CIK: 0001164508)

Note: Option positions (PUT/CALL) are excluded.

Q3 2016
Shares 299,481 Value ($000) $6,912 Avg Close — Range —
Q2 2016
Shares 155,917 Value ($000) $3,581 Avg Close — Range —
Q1 2016
Shares 133,377 Value ($000) $2,913 Avg Close — Range —
Q4 2015
Shares 25,737 Value ($000) $510 Avg Close — Range —
Q2 2013
Shares 134,891 Value ($000) $4,953 Avg Close — Range —